Organising Partners

Invited Speakers

Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering

In the first part of our contribution, special attention is paid to selective ALD/CVD growth on functionalized surfaces having modulated surface energies. Selective growth is obtained by passivation of the surface using self-assembled monolayers (SAMs) in the regions where deposition is not desired. Both vapor and liquid-scale deposition techniques are explored in the attempt of improving the quality and density of the SAM films obtained from octadecane thiol and octadecyl phosphonic acid precursors both on coupon and full 300mm wafer substrates.In the second part of this contribution, we report about the achievement of a complete pore sealing by combining a surface treatment of the porous low-k material together with SAM deposition and a low temperature ALD and CVD processes

BIOGRAPHY

Senior Scientist at imec in the process technology unit. Two masters in physical -chemistry and material science, PhD in microelectronics engineering, plus 15 years’ experience of the material research and microelectronics (focus on chemical mechanical planarization, electro- and electro-less deposition, atomic layer deposition, surface functionalization and thin film deposition and characterization, including novel low-k dielectric materials, such as periodic mesoporous organosilicas (PMOs) and metallorganic frameworks (MOFs)) with a strong blend of technical and scientific expertise. Author and coauthor of over 100 peer-reviewed publications and over 90 international conference contributions.

Vacuum Rabi splitting in a plasmonic cavity at the single quantum emitter limit

The strong interaction of individual quantum emitters with resonant cavities is of fundamental interest for understanding light matter interactions. Recent experiments revealed strong coupling between individual plasmonic structures and multiple organic molecules, but so far strong coupling at the limit of a single quantum emitter has not been reported. In the talk I will demonstrate vacuum Rabi splitting, a manifestation of strong coupling, using silver bowtie plasmonic cavities loaded with semiconductor quantum dots (QDs). A transparency dip is observed in the scattering spectra of individual bowties with one to a few QDs, directly observed in their gaps. The observations are verified by polarization-dependent experiments and validated by electromagnetic calculations.

BIOGRAPHY

Dr. Ora Bitton is an associate staff scientist at Weizmann Institute of Science (WIS), Israel. She received her B.Sc. in physics and computer science in 2007 and Ph. D. in Physics in 2011 at Bar-Ilan university, Israel. Her research area was experimental condensed matter physics with an emphasis on transport properties and applications of nanoscale devices. Her thesis focused on Single Electron Transistors (SETs) based on metallic nanoparticles at a strong coupling regime, a unique regime that has not been experimentally accessed before. In 2011, she joined the faculty of chemistry at WIS, as a staff scientist and head of the Nanofabrication center, a state-of-the-art fabrication facility for interdisciplinary research in nanoscience and applied nanotechnology. Her research activities include: physical properties of low dimensional systems and devices, molecular electronics, nano photonics and plasmonics. In addition, she provides top-level technological and scientific support to different research groups from nano-scale science.

EUV insertion at the N5 node

The foundry N5 node is considered to be the first scaling node at which industry will likely insert EUV into production, being the most critical BEOL layers the ones that are expected to early-adopt EUV to replace the more expensive multi-patterning schemes needed if immersion lithography would still be used.

In this talk we will review current status of EUV maturity for insertion into production, including cost, source power, materials, defectivity… and finally we will show the imec patterning results on the N5 equivalent platform for different layers and patterning strategies, including single exposure of metals, SAQP plus block solution or single exposure of vias.

BIOGRAPHY

Victor Blanco received his MSc degree in Physics by university of Zaragoza and Electronic Engineering by university of Valladolid. During his PhD degree at the University of Twente he worked on wafer level CMOS post-processing for sensors applications, followed by a Postdoctoral position at NIKHEF working on gaseous radiation imaging detectors for nuclear physics.
He joined ASML in 2010 working on several topics including defectivity for immersion and EUV lithography, throughput and yield. Since 2015 he works at imec on the Advance Patterning Center to evaluate EUV capabilities for its insertion in BEOL layers.

Scalable Printing of Nano and Microscale Electronics and Wearable Sensors

A new printing technology for printing of nano and microlectronics and sensors on flexible or rigid substrates has been developed. The technology is capable of printing a 1000 times smaller patterns (about 20 nanometers) than inkjet. This printing technology can print inorganic or organic conductors, semiconductors or insulators. 1000 times faster than inkjet and costs 10-100 times less than conventional fabrication. This presentation will show the applications of this technology in printing electronics and sensor applications. The technology is used to print a biosensor platform for real-time pathogen monitoring and for wearable sensors to monitor physiologic state. These printed flexible sensors were printed for wearable sensors that could be used as an electronic skin or for physiological monitoring as well as environmental monitoring.

BIOGRAPHY

Ahmed A. Busnaina, Ph.D. is the William Lincoln Smith Chair Professor, Distinguished University Professor and founding Director of National Science Foundation’s Nanoscale Science and Engineering Center for High-rate Nanomanufacturing at Northeastern University, Boston, MA. Prof. Busnaina is recognized for his work on directed assembly-based printing of micro and nanoscale devices for electronics, sensors, energy, biomedical and materials applications. His research support exceeds $53 million. He authored more than 600 papers in journals, proceedings and conferences in addition to 50 filed and awarded patents. He is an editor of the journal of Microelectronic Engineering and associate editor of the Journal of Nanoparticle Research. He is a fellow of the American Society of Mechanical Engineers, and the Adhesion Society, a Fulbright Senior Scholar.

Nanomechanics for the life sciences

Physical and, among them, mechanical properties of biological entities as cells, bacteria, viruses and biomolecules are valuable cues to pursue a better understanding of human diseases. Still, this has remained an underexplored route for the development of novel biosensing and diagnostic strategies. Nanomechanical devices, and particularly, nanoresonators, are excellent suited tools to address this challenge, as vibrations of these sensors upon interaction with biological entities, when carefully interpreted, serve to catch several physical parameters. Mass, volume, density and stiffness of biological adsorbates can be measured in a very direct manner with these devices. I will discuss in this talk what nanomechanics can offer to answer basic questions in the field of biology and biomedicine.

BIOGRAPHY

Permanent Researcher at the Microelectronics Institute of Madrid-CSIC, where she has been head of Dept. of Devices, Sensors and Biosensors from 2008 to 2012. Since 2004 she has focused her research in nanomechanical sensing, developing new instrumentation and technologies for the application of nanomechanics to biology. Leaded the ERC Starting Grant project NANOFORCELLS from 2011 to 2016, devoted to cell mechanobiology.

Present research interests are focused on the development of nanomechanical devices to study conformational changes in proteins (ERC Consolidator Grant LIQUIDMASS) and of nanomechanical mass and stiffness spectrometry for virus identification (FET-Pro Active project VIRUSCAN). Inventor of over 10 patents and founder of Mecwins SA and Nanodreams SL. Awarded Miguel Catalán research prize for researchers under 40 years in 2012.

Packaging R&D at NANIUM: Stretching Fan-Out Wafer Level Packaging to New Limits and Markets

Along the evolution of IC design and front-end node shrinkage, Electronic Packaging has evolved from a passive role in IC functioning, to a crucial role on performance and function on modern systems. Wafer-Level-Fan-Out (WLFO) is a fast-growing packaging technology, especially fit for high density integration solutions as System-in-Package and 3D-Packaging, which address the market demands of thinner, smaller, denser, high-performance and low-cost packaging. Despite its wide success, WLFO still faces technology challenges on MEMS and sensors integration. Low temperature process, low stress embedding, the merging of RDL with microfluidics, are some examples of R&D developments and ideas to stretch WLFO Packaging to new limits and to meet the expanding markets of IoT, Wearables and bio-medical applications.

BIOGRAPHY

André Cardoso started his carrier at Texas Instruments Portugal and worked in the US in R&D for semiconductor equipment.
He joined Infineon, working on FBGA process development and later in Package Development in Dresden. André joined the Packaging R&D at Nanium in 2011, and has been working on 300mm Fan-out Wafer Level Packaging, focusing on new technologies for System-In-Package; Ultra-Thin Packaging; 2.5D and 3D; MEMS integration; and Biomedical applications in Fan-Out technology.
He holds 11 patents and published several papers in multiple research areas.

Fabrication of piezoelectric actuators with a pure twisting response

We attempted to adapt a known fabrication process, to produce bulk-unimorph piezoelectric beams that can respond in pure twisting. Our design includes an elaborate system of interdigitated electrodes, and consequently the fabrication process failed due to massive electrostatic discharging that scorched the electrodes. By omitting resist stripping in two lift-off processes, we were able to rectify the failed process flow, and also considerably improve handling and alignment.

BIOGRAPHY

Professor Elata’s research focuses on modeling and design of MEMS, and on developing new concepts for electrostatic, thermoelastic, piezoelectric and electromagnetic actuators. He serves the MEMS community as a member of the editorial boards of IEEE-JMEMS and IEEE-SENSORS Letters, and as a member of the Technical Program Committees of leading conferences in the field.

Multi-functional systems for cell and organ-on-a-chip developments

2D to 3D bioanalytical cell and organ-on-a-chip systems will be presented that can be applied in different biomedical and environmental settings. 2D and 3D biosensing cell and organ-on-a-chips are equipped with different scaffolds for support and culturing of cells that inherently have : (i) structured perfusable channel network, enabling delivery of necessary nutrients and oxygen to the interior of the scaffolds, (ii) secondary more arbitrary random porous network that can enclose a hydrogel phase with a “nearby” source of important cell factors, supporting the growth and differentiation of cells, and (iii) ability to conduct or sense electrical currents.

BIOGRAPHY

Emnéus pursued her academic career at Lund University, Sweden and was recruited as a Professor at DTU Nanotech in 2007 where she now leads the LOC strategic field and Bioanalytics group. She has in the past coordinated 7 EU projects and currently has two Marie Sklodowska Curie ITN projects in H2020, one of which she is coordinating (Training4CRM). She has served as an evaluator and expert panel member of e.g. Swedish and Norwegian Research Councils, EU FP7 environment program and is since 2012 a Life Science panel member for ERC starting grant. She has vast experience of development and application of biosensors and 2D and 3D Lab-on-a-chip devices. Her main research interest is focused on bioanalytical systems (enzymes, antibodies and cells) using multi-parameter detection (optical and electrochemical), and organ-on-a chip system and 3D scaffolds for tissue engineering.

Micro/Nano Systems for Biofilm Exploration and Eradication

Biofilms account for more than 70% of hospital acquired infections (HAIs) and impart increased antibiotic resistance to biofilm-encapsulated-bacteria, adhered to wet surfaces. We have developed numerous micro/nano systems for exploring biofilm growth in real-time in tightly controlled and reproducible manner. Operating in parallel and leveraging small volumes, these microfluidic platforms can aid us in understanding the fundamental mechanisms of biofilm formation and for the discovery of novel therapeutics. Furthermore, we have also developed integrated feedback based microelectronic sensor-treatment systems towards in vivo applications in medical implant, such as a catheter. Thus, the micro/nano systems discussed here are aimed towards the development of autonomous microsystems capable of identifying and treating biofilms in a translational setting, to address challenges like post-operative infections.

BIOGRAPHY

 

Reza Ghodssi is the Herbert Rabin Distinguished Chair in Engineering, Director of the Institute for Systems Research (ISR) and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) and the Institute for Systems Research (ISR) at the University of Maryland (UMD). Dr. Ghodssi’s research interests are in the design and development of microfabrication technologies and processes in micro/nano/bio devices and systems for chemical and biological sensing, small- scale energy conversion and harvesting with a strong emphasis toward health monitoring applications. Dr. Ghodssi is a Fellow of IEEEAVS, and ASME, a 2014-2015 University of Maryland Distinguished Scholar-Teacher, has over 140 journal publications and 300 refereed conference papers, and is the co-editor of the MEMS Materials and Processes Handbook published in 2011. He is an associate editor for the Journal of Microelectromechanical Systems (JMEMS) and Biomedical Microdevices (BMMD). He has obtained seven U.S. patents, with another eight pending.

Epoxy-based Polymer Networks as a Tool for the Design of New Functional Materials

Cross-linked polymer networks offer a versatile answer for the synthesis of smart materials with applications in priority areas like energy, food, environment, medicine, among others. In this talk, selected examples of functional materials based on epoxy crosslinked networks will be discussed. The synthesis of self-healable vitrimers based on the epoxy acid chemistry will be first discribed. Especial attention will be paid to the use of the photothermal effect for remote activation of the transesterification processes. The design and synthesis of shape memory epoxy networks will also be analyzed with the focus put in the possibility on local control of the activation. Finally, thermoreversible organogels and other supramolecular networks will also be analyzed in the context of new applications in thermal storage.

BIOGRAPHY

Cristina E. Hoppe was born in Buenos Aires, Argentina, in 1975. She graduated in Chemistry (2000) at the University of Mar del Plata, where she also received her Ph.D. in Materials Science (2004) working on polymer dispersed liquid crystals (PDLC) under the supervision of Prof. Roberto J. J. Williams (Institute of Materials Science and Technology, INTEMA, UNMdP/CONICET). In 2004 she was awarded a Postdoctoral Antorchas fellowship and she moved to the University of Santiago de Compostela (Nanotechnology and Magnetism group), Spain, where she worked with Prof. Arturo López Quintela in the synthesis and characterization of metal and oxide nanoparticles. After one year she was awarded a Marie Curie European Postdoctoral Fellowship (International Incoming Fellowship, 6th framework Programm) to work in the arrangement of nanoparticles in polymer multiphasic systems. She returned to Argentina in December 2007.

She is currently working at INTEMA (Nanostructured Polymers Group) as staff researcher (independent researcher CONICET). She has be in charge of several research projects in the field of polymer materials and nanomaterials. She has participated as Argentina representative in international cooperation official missions to USA, Portugal, Italy, Mexico and South Africa in the framework of I+D cooperation agreements in Nanoscience and Nanotechnology.

Their main research interests are related with the design and application of functional polymers and nanocomposites.

Development of a MEMS Loudspeaker or ‘The Role of Luck in MEMS development”

Loudspeaker technology basics have not changed much in over a 100 years. Audiopixels have spent the last 10 years developing a digital MEMS loudspeaker. We manufactured a proof of our Digital Sound Reconstruction speaker concept using an expensive triple SOI process in 2009, and have spent the time since then developing a feasible MEMS manufacturing process, compatible with a production environment, the HV ASIC driver, the package and the software that runs it.

BIOGRAPHY

Shay Kaplan has an academic background in chemistry physics and material science. Infrared detector development and manufacturing group manager, Photolithography section head and a development program manager in a microelectronics fab. A founder and manager of A small MEMS foundry and an entrepreneur and co-founder of several companies, including Audiopixels LTD, a MEMS loudspeaker company.

Computation with biological agents

Many mathematical problems, e.g., cryptography, network routing, require the exploration a large number of candidate solutions. Because the time required for solving these problems grows exponentially with their size, electronic computers, which operate sequentially, cannot solve them in a reasonable time. However, biological organisms routinely process information in parallel, thus opening three possible biocomputing avenues:
Biomimetic algorithms are translations of “analog” procedures used by biological agents for various tasks, e.g., space searching, chemotaxis, etc., into mathematical algorithms.
Biosimulation uses the procedures of large numbers of motile biological agents, directly, without any translation to formal mathematical algorithms, thus by-passing computation-proper.
Computing with biological agents in networks consists in the use of very large number of agents exploring microfluidics networks, designed to purposefully encode hard mathematical problems.

BIOGRAPHY

Dan, who is the founding Chair of the Department of Bioengineering at McGill University, has a PhD in Chemical Engineering, a MS in Cybernetics, Informatics & Statistics and a MEng in Polymer Science & Engineering. He has published 100+ papers in peer-reviewed scientific journals, a similar number of full papers in conference proceedings and 6 book chapters. He has edited one book (on microarray technology and applications), and edited or co-edited the proceedings of 30+ conferences. Dan is a Fellow of the International Society of Optical Engineering (SPIE). Dan’s present research aggregates around three themes: (i) micro/nano-structured surfaces for micro/nano-arrays fabricated via classical microlithography, micro-ablation and Atomic Force Microscopy; (ii) dynamic micro/nanodevices, such as microfluidics/lab-on-a-chip and devices based on protein molecular motors, with applications in diagnosis, drug discovery and biocomputation devices; (iii) intelligent-like behaviour of microorganisms in confined spaces, which manifests in the process of survival and growth, with applications in biocomputation and biosimulation.

Probing emergent phenomena through large-scale atom manipulation

It is difficult to predict how material properties arise, even when you know the exact quantum mechanical behaviour of all the atoms comprising the material. In order to gain insight in what constitutes a material, we build artifical materials ourselves atom-by-atom and probe their characteristics as they emerge.

BIOGRAPHY

Sander Otte received his PhD from Leiden University, The Netherlands, in 2008. He was involved in pioneering experiments on inelastic spin excitations on individual atoms at IBM Research (San Jose, USA). During his postdoc at NIST (Gaithersburg, USA) he participated in the construction of a mK STM facility, and used this for the study of Landau quantization in epitaxial graphene. From 2010, Otte runs a research group at Delft University of Technology, The Netherlands (tenured 2015), focusing on assembly of atomic lattices for the purpose of studying correlated electrons. In 2016, his group developed a new technique to manipulate atoms on a large scale and used this technique to write a kilobyte in atoms – the most complex atomic structure built to date.

How to interface the brain with MEMS-based implants

Targeting the treatment of neurological disorders representing a severe burden for public health systems requests an in-depth understanding of brain function and the respective investigation of dysfunctions. This neuroscientific endeavor relies among others on modern non-invasive imaging techniques visualizing brain activity and interaction among brain areas at the level of larger populations of neurons. An improved resolution down to the cellular level in the observation of as well as interference with neural activity requests however miniaturized multifunctional implantable tools. The paper addresses recent developments of neural implants realized using MEMS technologies combined with CMOS-based integrated circuitry as well as photonic components enabling an interaction with brain tissue in the electrical and optical domains. In addition, clinical applications of these innovative devices are discussed.

BIOGRAPHY

Patrick Ruther studied physics and received the Ph.D. degree in mechanical engineering in 1996. Between 1996 and 1998, he was PostDoc at the Research Center Karlsruhe, Germany, developing LIGA-based microoptical components and systems. Since October 1998, he is Senior Scientist at the Department of Microsystems Engineering (IMTEK), University of Freiburg. His focus is on the design, fabrication, and characterization of CMOS-compatible MEMS devices for biomedical applications in neuroscience. He coordinated the EU project NeuroSeeker targeting the next generation of neural probes comprising electrical and optical functionality. He is a cofounder of the spin-off company ATLAS Neuroengineering bvba, Belgium.

Quantum dots for nanobioimaging and diagnostics

Fluorescence provides a unique method for understanding how biomolecules interact with each other in many levels, from single cell to whole organisms. II-VI semiconductor quantum dots have arisen as versatile fluorescent nanotools for imaging the biologic world. These nanocrystals first introduced in 1998, possess very interesting optical  properties, such as high brightness, high photobleaching resistance, and a size tunable optical profile due to their quantum confinement regime. Their active surface specially the water-soluble QDs allow their conjugation to different biocompatible molecules rendering innovative methodologies which can be applied for the comprehension of biological process as well as for diagnostics and therapeutic purposes, such as the detection of cancer cells, the differentiation of blood sub-types, cell carbohydrate profiling and development of immunodiagnostic methods for neglected diseases.

BIOGRAPHY

Beate Saegesser Santos has earned her Doctor degree in Inorganic Chemistry in 2002 and, since then, she has joined as full professor the Pharmaceutical Sciences Department at the Universidade Federal de Pernambuco in Brazil. She is the co-leader of the Biomedical Nanotechnology research group (NanoBio), a member of the Brazilian National Institute of Photonics (INFo), of the Brazilian Chemistry Society and, also, an AAPS member. The main topics of her research field focuses the preparation, characterization and the design of II-VI semiconductor quantum dots, mainly for applications at the biological interface. She has published articles, patents and Book Chapters showing diverse applications of quantum dots as fluorescent tools to label cells and tissues (i.e. red blood cells, yeast cells, benign and malign mammary tumor cells and tissues in vitro, glial and glioblastoma cells in vivo). She has recently co-edited a Book entitled “Quantum Dots: Applications in Biology” depicting some of the main applications of quantum dots. She has supervised many post-docs, graduate and undergraduate students and earned many prizes including the SPIE 2005 Award of the International Society for Optical Engineering.  Her current focus deals with (i) the engineering of fluorescent bioconjugates for the detection of specific pathological antigens and antibodies,  (ii) the design of new versatile theranostic and/or multipurpose diagnostic nanophotonic tools, (iii) the development of new pharmaceutical formulations for photodynamic therapy and (iv) the design of new electrochemical-nanophotonic based biosensors using nanoparticles and/or fluorescent molecules.

Industrial Scale High Precision 3D Printing

The demand of sophisticated components is continuously increasing, driven by big data, IoT, and Industry 4.0. Reducing cost and time to market impacts all levels in a vast majority of products. 3D printing is typically restricted to additive fabrication within one material class, structures are limited in size, shape, surface finish, requiring supporting structures. This prevents high quality photonic components. High precision 3D printing is a powerful tool for rapid prototyping of miniaturized designs in automated, scalable processes. The fabrication of optical elements and lens arrays of cm2 in size with high optical quality can be boosted significantly by their fabrication strategy, saving more than 90 % of the fabrication time – a big step towards high throughput and industrial scalability.

BIOGRAPHY

Dr. Benedikt Stender, CTO of Multiphoton Optics GmbH since June 2016, Application Engineer in 2015. PhD work from 2011 till 2015 at the University Würzburg, Germany, on single photon sources and printed electronics (organic LEDs). Diploma thesis on ink-jet printed microlenses in 2011. In 2008-2009 internship at the University of British Columbia, Vancouver (Canada). Study of Nanostructure Technology at the University of Würzburg from 2005-2011

Conformal nanogaps fabricated by cleavage of single-crystal silicon on MEMS

Nanogaps, in which the gap distance is smaller than 100 nm, are attracted great attentions not only for characterization of physics in nanoscale, such as electron tunneling effect, Casimir effect and thermal proximity effect, but also for development of high performance small energy devices. Researchers need to have large-area nanogaps, but it is difficult even though the gap area is few micrometers square. We have proposed a method to fabricate a conformal nanogap by “fracture fabrication” using cleavage of single crystal materials. Though its fabrication process is simple, conformal gap with atomically smooth surfaces is inherently obtained. The fracture fabrication of the nanogap and its characterization using microelectromechanical system (MEMS) device and its future applications of it will be presented.

BIOGRAPHY

Toshiyuki Tsuchiya received the M.S. degree from the University of Tokyo, Japan, and the Ph.D. degree from Nagoya University, Japan, in 1993 and 2004, respectively. He worked with Toyota Central Research and Development Laboratories from 1993 to 2004. In 2004, he joined Kyoto University as an Associate Professor and now belongs to the Department of Micro Engineering, Kyoto University, Japan. He is currently engaged in the research of silicon micromachining, its application in MEMS, the mechanical property evaluation of micro materials, and the reliability of MEMS devices. He has been involved in several conferences and workshops dealing with MEMS and microsystems, including the International Conference on Solid-State Sensors and Actuators (Transducers), the international conference on Micro Electromechanical Systems (MEMS), Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT) and many domestic conferences. He was a general chair of the IEEE MEMS 2013 in Taipei. Dr. Tsuchiya is an Editorial Board Member of Journal of Micromechanics and Microengineering, Institute of Physics Publishing and Micro & Nano Letters, the Institute of Engineering and Technology. He was honored with R&D 100 Award for research in “Thin film Tensile Tester” in 1998 and IEC 1908 Award in 2012 by the International Electrotechnical Commission. Dr. Tsuchiya is a member of IEEE, MRS, the Institute of Electrical Engineers of Japan, the Japan Society of Applied Physics and the Japan Society of Mechanical Engineers.

Micro Supercapacitors for Energy Storage Based on Prototyping of Nanomaterials

The rapid development of portable and wearable electronics has greatly increased the demand for energy storage devices with similar physical properties and integration capability. With the advantages of high charge/discharge rate, long cycle life and high energy efficiency, supercapacitors can bridge the gap between traditional capacitors and batteries, and are of the same importance as rechargeable batteries to energy storage systems. A high-aspect-ratio 3D micro supercapacitor is introduced combining deep etching techniques with self-supporting active materials. In order to develop an effective and direct way for batch fabrication of micro energy storage devices at wafer level, we demonstrate an idea of incorporating nano templating method into photolithography technology. We also introduce a novel polydimethylsiloxane substrate for stretchable microsupercapacitor (MSC) arrays, which enables facile integration with other electronics.

BIOGRAPHY

Xiaohong (Ellen) Wang is a professor in Tsinghua National Laboratory for Information Science and Technology, Institute of Miroelectronics, Tsinghua University in China. She received her Ph. D degree in Mechanical Engineering, Tsinghua University in 1998. As a visiting scholar, she did the research on the electrode materials of micro SOFC in Stanford University from Nov. 2005 to Oct. 2006. She also had a short visiting research experience in Hong Kong University of Science and Technology and UCLA, on micro fuel cells and nano- photodetector devices in 2001 and 2007, respectively.
Her research is on the fields of MEMS/NEMS design, fabrication, materials, assembly, and integration technologies, in particular on Power-MEMS, like micro fuel cell (uDMFC), micro supercapacitors, silicon-based micro lithium batteries, etc. She is also interested in combining Bio & Power MEMS, such as biological microgenerators.
She has served several international conferences as TPC member, like IEEE-MEMS, Transducers, IEEE-NEMS, and PowerMEMS. She also was the General Co-Chair of IEEE MEMS2016, held in Shanghai, China. She is an Associate Editor of IEEE/ASME JMEMS and PNG Microsystems & Nanoengineering.

Engineering and Processing of 10 nm 3D structures for FET applications

Technology for processing of vertical nanowire transistors at dimensions of 10 nm is discussed. Key process modules include the formation of spacer layers, ohmic contact technology, and the gate formation. Introducing an HSQ spacer technology where the thickness is controlled by the electron beam exposure, allows the evaluation of the ohmic contacts in a vertical TLM structure, as well as the introduction of a self-aligned gate-last process. These steps may be controlled down to a level approaching 10 nm. Combined, these modules are used to fabricate III-V MOSFETs and TunnelFETs with state-of-the-art performance as will be presented in this talk.

BIOGRAPHY

Lars-Erik Wernersson received the M.S degree the Ph.D. degree in Solid State Physics at Lund University in 1993 and 1998, respectively. Since 2005 he is Professor in Nanoelectronics at Lund University, following a position at University of Notre Dame 2002/2003. His main research topics include nanowire- and tunneling- based nanoelectronic devices and circuits for low-power electronics and wireless communication. He has authored/co-authored more than 200 scientific papers. He has been awarded two individual career grants and he served as Editor for IEEE Transaction on Nanotechnology. He is coordinator for the H2020 project INSIGHT.

OSTE polymer – a new material for biomedical micro- and nanosystems

Off-stoichiometry thiol-ene polymers, in short OSTEmers, are the first polymer system specifically designed for lab-on-a-chip applications. The polymers unique properties stem from the fact that they feature reactive groups on their surface, which allows straightforward covalent surface modification and bonding of the material. The presentation will introduce the material system, as well as a number of novel diagnostic and therapeutic applications enabled by this material.

BIOGRAPHY

Wouter van der Wijngaart received the M. Sc. degree in Electrotechnical Engineering, the Degree of Philosophic Academy and the Mathematics Education Degree, all from the Katholieke Universiteit Leuven, Belgium, in 1996. Wouter received the Ph. D. degree in microsystem technology at KTH in 2002, where in 2005 he promoted to Associate Professor and in 2010 to full Professor. Wouter is currently leading the research in micro- and nanofluidic systems at KTH, with a research focus on lab-on-chip systems for medical applications.

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