1. Novel Developments in Nano/Micro Fabrication Methods and processes
Contributions to this topic should present novel approaches to micro/nanofabrication, improvements of existing processes, advances in materials for micro/nano fabrication, a significant evolution of stablished fabrication methods or advances in emerging fabrication methods. Contributions in this topic should be mainly concentrated in a single process/method.
Examples of possible sub-topics could be:
Lithography: Photon Lithography (UV, DUV, EUV, Direct writing, two photon lithography), Electron and ion beam lithography, Nanoimprint lithography and other replication methods, Scanning Probe Lithography.
Patterning: Beam induced deposition and etching, Advanced pattern transfer methods, Atomic Layer Deposition, Resist Materials, Self-Assembly and Directed Self-Assembly, Stencil Lithography, bottom-up methods, nanoparticles.
Materials: Resist Materials.
Other: Nanomanipulation and Precise Patterning, 3D nanomanufacturing, controlled modification of surfaces.
2. Fabrication and Integration of Micro/Nano Structures, Devices and Systems
Contributions to this topic should address the fabrication of new micro/nano structures, new fabrication approaches to existing devices or the integration of structures and devices into new smart systems. The emphasis in this topic should be given to the integration of processes and technologies to build devices or systems with added functionality.
Targeted areas in this topic can be:
- Fabrication and integration of MEMS/NEMS and nanodevices.
- Inspection, process control and manufacturability testing.
- System design and integration.
- Packaging technology and reliability.
3. Micro/Nano Engineering for Physical and Chemical Applications
Contributions to this topic should present the use of micro/nano fabrication methods for building up new solutions for applications areas in Physical and Chemical disciplines. The solutions can be in the form of nano/micro structures, surface texturing, devices and systems, either incorporating stablished or novel micro/nano engineering methods. Targeted applications areas can be:
- ICT: Electronics, telecommunications, information processing.
- Energy: Solar cells, energy harvesting, fuel cells, etc.
- Physical and chemical sensors: gas sensors, mechanical sensors, optical sensors.
- Optics and photonics. Nano-optics. Metamaterials. Plasmonics.
- Data Storage.
4. Micro/Nano Engineering for the Life Sciences
Contributions to this topic should address biological problems and show how micro/nano engineering can provide with the appropriate solution, starting from biomaterials, technological processes, algorithms, biomimetics, microelectromechanical systems for biological sensing (BioMEMS) or, in general, any kind of development that results in an advance in biology and medicine. Targeted areas can be:
- Bio-inspired technologies.
- Bio-mimetic surfaces.
- Micro and nano fluidic systems and their fabrication.
- Applications of micro and nano engineered fluidic systems for life sciences.
- Design and fabrication of micro/nano devices for life sciences: biosensors, prosthesis, …
- Interfacing biomaterials and bio-entities with devices and systems.